Table 1.
Configuration | SEMs | ψi(i=1∼q) | q |
---|---|---|---|
G5 | Linear-X, Linear-Y, Multipolar-1, Multipolar-2, O | ψx, ψy, ψm1, ψm2, ψo | 5 |
M4 | Linear-X, Linear-Y, Multipolar-1, Multipolar-2 | ψx, ψy, ψm1, ψm2 | 4 |
O3 | Linear-X, Linear-Y, O | ψx, ψy, ψo | 3 |
M2 | Multipolar-1, Multipolar-2 | ψm1, ψm2 | 2 |
L2 | Linear-X, Linear-Y | ψx, ψy | 2 |