Table 2. The values of Ge concentration, x, dislocation density, ρ, and layer thickness, d, for the second set of samples using high-resolution RSM data; the factor of dislocation correlation γ ≃ 1; the values of concentration x _XRR and thickness d _XRR using reflectivity measurements; and the thickness d _TEM obtained from TEM measurements.

d TEM (nm)	x	d (nm)	ρ (nm−1)	γ	d XRR (nm)	x XRR
50.0 (5)	0.59 (5)	45 (15)	0.107 (8)	1.1800 (2)	49.61 (2)	0.60 (2)
100.0 (5)	0.61 (3)	100 (10)	0.135 (5)	1.0300 (3)	88.06 (9)	0.60 (3)
200.0 (5)	0.63 (6)	200 (60)	0.16 (1)	1.1100 (9)	199.0 (1)	0.60 (5)