U11	U22	U33	U12	U13	U23
C1	0.0421 (12)	0.0421 (12)	0.0334 (11)	−0.0032 (10)	0.0014 (9)	0.0005 (9)
C2	0.0523 (13)	0.0468 (13)	0.0341 (12)	−0.0107 (11)	0.0099 (10)	−0.0078 (10)
C3	0.0439 (12)	0.0403 (12)	0.0510 (14)	−0.0058 (10)	0.0186 (10)	−0.0095 (11)
C4	0.0342 (11)	0.0407 (12)	0.0533 (14)	−0.0023 (9)	0.0048 (10)	0.0005 (10)
C5	0.0362 (11)	0.0359 (11)	0.0354 (11)	−0.0074 (9)	0.0023 (8)	−0.0038 (9)
C6	0.0334 (10)	0.0292 (10)	0.0342 (11)	−0.0072 (8)	0.0056 (8)	−0.0008 (8)
C7	0.0329 (10)	0.0325 (11)	0.0342 (11)	−0.0016 (8)	−0.0002 (8)	0.0004 (9)
C8	0.0325 (10)	0.0301 (11)	0.0401 (12)	−0.0018 (8)	0.0065 (8)	−0.0025 (9)
C9	0.0336 (11)	0.0371 (12)	0.0520 (14)	−0.0031 (9)	0.0066 (10)	−0.0091 (10)
C10	0.0599 (15)	0.0415 (14)	0.0707 (17)	−0.0169 (12)	0.0173 (13)	−0.0015 (12)
C11	0.062 (2)	0.0432 (19)	0.0571 (19)	−0.0125 (14)	0.0095 (16)	0.0095 (15)
C11'	0.062 (2)	0.0432 (19)	0.0571 (19)	−0.0125 (14)	0.0095 (16)	0.0095 (15)
C12	0.0615 (15)	0.0446 (13)	0.0417 (13)	−0.0119 (11)	0.0136 (11)	0.0021 (10)
C13	0.0379 (11)	0.0303 (11)	0.0405 (12)	−0.0044 (9)	0.0084 (9)	−0.0011 (9)
C14	0.0345 (10)	0.0297 (10)	0.0399 (12)	−0.0027 (8)	0.0081 (8)	−0.0001 (9)
C15	0.0360 (10)	0.0271 (10)	0.0358 (11)	−0.0005 (8)	0.0044 (8)	0.0014 (8)
C16	0.087 (2)	0.076 (2)	0.0483 (16)	−0.0372 (16)	0.0119 (14)	−0.0187 (14)
N1	0.0514 (11)	0.0311 (10)	0.0404 (11)	0.0013 (8)	0.0063 (8)	0.0047 (8)
N2	0.0542 (11)	0.0378 (11)	0.0416 (11)	−0.0144 (9)	0.0102 (9)	−0.0070 (9)
O1	0.0555 (9)	0.0415 (9)	0.0341 (8)	−0.0178 (7)	0.0051 (7)	−0.0012 (7)
O2	0.0482 (10)	0.0634 (11)	0.0606 (12)	−0.0179 (8)	0.0035 (8)	−0.0148 (9)
O3	0.0695 (11)	0.0331 (9)	0.0572 (11)	−0.0129 (8)	0.0109 (8)	0.0050 (7)
O4	0.0923 (14)	0.0494 (10)	0.0353 (10)	−0.0065 (9)	−0.0008 (9)	0.0095 (8)
Cl1	0.0797 (5)	0.0901 (6)	0.0916 (6)	0.0240 (4)	0.0224 (4)	−0.0350 (5)