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. Author manuscript; available in PMC: 2013 Sep 16.
Published in final edited form as: Ultrasonics. 2011 Nov 11;52(4):497–502. doi: 10.1016/j.ultras.2011.11.001

Fig. 2.

Fig. 2

PMN-PT 1-3 composite structures by dry etching (The etching depth is about 30 μm, the gap between each array element is 16 μm, the pillar size is 9 μm by 9 μm, and the kerf between each pillar is 5 μm. With the same area of each element, the width of the outer element is only about 100μm.)