U11	U22	U33	U12	U13	U23
Cl1	0.0365 (3)	0.0364 (2)	0.0259 (2)	0.01030 (19)	−0.00156 (17)	−0.00172 (16)
S1	0.0199 (2)	0.0253 (2)	0.0326 (2)	0.00772 (16)	0.00336 (15)	0.00359 (15)
O1	0.0207 (6)	0.0284 (6)	0.0265 (6)	0.0073 (5)	0.0031 (4)	−0.0001 (4)
O2	0.0316 (7)	0.0302 (6)	0.0614 (9)	0.0115 (6)	0.0178 (6)	−0.0034 (6)
C1	0.0214 (8)	0.0241 (7)	0.0262 (7)	0.0090 (6)	0.0017 (6)	0.0007 (6)
C2	0.0218 (8)	0.0215 (7)	0.0281 (8)	0.0091 (6)	0.0014 (6)	0.0021 (6)
C3	0.0257 (8)	0.0260 (7)	0.0269 (8)	0.0107 (6)	0.0035 (6)	0.0021 (6)
C4	0.0303 (9)	0.0243 (7)	0.0255 (7)	0.0106 (7)	−0.0008 (6)	0.0001 (6)
C5	0.0252 (8)	0.0272 (8)	0.0315 (8)	0.0076 (7)	−0.0026 (7)	0.0006 (6)
C6	0.0226 (8)	0.0287 (8)	0.0329 (8)	0.0089 (7)	0.0031 (6)	0.0024 (6)
C7	0.0238 (8)	0.0237 (7)	0.0256 (7)	0.0098 (6)	0.0021 (6)	0.0015 (6)
C8	0.0201 (8)	0.0218 (7)	0.0290 (8)	0.0073 (6)	0.0021 (6)	0.0021 (6)
C9	0.0241 (8)	0.0240 (7)	0.0258 (7)	0.0117 (6)	0.0034 (6)	0.0014 (6)
C10	0.0301 (9)	0.0248 (7)	0.0282 (8)	0.0081 (7)	0.0072 (7)	0.0031 (6)
C11	0.0297 (9)	0.0234 (7)	0.0329 (8)	0.0065 (7)	0.0046 (7)	−0.0028 (6)
C12	0.0311 (9)	0.0278 (8)	0.0275 (8)	0.0132 (7)	0.0030 (7)	−0.0024 (6)
C13	0.0298 (9)	0.0296 (8)	0.0270 (8)	0.0123 (7)	0.0075 (7)	0.0048 (6)
C14	0.0228 (8)	0.0236 (7)	0.0301 (8)	0.0081 (6)	0.0040 (6)	0.0027 (6)
C15	0.0417 (11)	0.0422 (10)	0.0295 (9)	0.0116 (9)	0.0035 (8)	−0.0084 (7)
C16	0.0342 (10)	0.0272 (8)	0.0355 (9)	0.0118 (7)	0.0087 (7)	0.0073 (7)