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Scanning electron micrographs of tungsten (W) structures. (a, b) Bull’s eye pattern prepared via template stripping (TS). (c, d) Bull’s eye pattern made via conventional reactive-ion etching (RIE) for comparison. Both bull’s eye structures have a groove periodicity of 3.5 μm and a groove depth of ∼200 nm. (e) Micro- and (f) nano-scale pyramid arrays prepared by TS. The pyramids have a base length of ∼9 μm and 350 nm, respectively.
