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Scanning electron micrographs of a multilayered wedge structure made via template stripping. (a) Cross-section obtained by focused-ion-beam milling. (b) Close-up of the cross section showing the four layers of silver (Ag), aluminum-doped zinc oxide (AZO), silicon (Si), and indium tin oxide (ITO) (from top to bottom). These layers have thicknesses of ∼250, ∼65, ∼350, and ∼110 nm, respectively.
