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. Author manuscript; available in PMC: 2014 Aug 1.
Published in final edited form as: J Micromech Microeng. 2013 Jun 21;23(8):10.1088/0960-1317/23/8/085001. doi: 10.1088/0960-1317/23/8/085001

Figure 5.

Figure 5

Force-voltage (F-V) relationship of ACS exhibits expected quadratic behavior. A calibrated piezoresistive cantilever was used to quantify the resulting force due to voltage applied to the ACS (dotted black curve). The best fit of the entire curve produced β = 0.019 μN/V2 (R2 = 0.996). Small initial displacements are due to initial overlap of the electrodes (2 μm) and suggest an operating range above 5 V. The empirical data falls between a basic analytical model that ignores fringe fields (βbasic = 0.010 μN/V2) and a comprehensive alternate model [21,22] yielding βfringe = 0.048 μN/V2.