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. 2013 Aug 14;13(8):10550–10560. doi: 10.3390/s130810550

Figure 6.

Figure 6.

Simulated frequency response of the designed MEMS gyroscope. (a) Frequency response of m2 against damping factors at room temperature; (b) The sense mode frequency response against temperature variations; (c) The drive mode frequency response of against temperature variations.