Table 1.
Performance of thermal calibration equipment.
Turntable | |
---|---|
Principal axis rotation range | Continuous infinite |
Principal axis angular position accuracy | ±5″ |
Tilting axis rotation range | ±95° |
Tilting axis angular position accuracy | ±5″ |
Non-orthogonalities between axes | ±5″ |
Thermal Chamber | |
| |
Temperature range | −55 ∼ +100 °C |
Temperature change rate | ±0.1 ∼ ±5 °C/min linear |