Table 1.
Dish positions | Exposure system A |
Exposure system B |
||
---|---|---|---|---|
Center (mTrms) | Periphery (mTrms) | Center (mTrms) | Periphery (mTrms) | |
1st layer | 1.85 | 1.89 | 1.85 | 1.88 |
2nd layer | 1.94 | 1.98 | 1.92 | 1.97 |
3rd layer | 1.94 | 1.99 | 1.93 | 1.97 |
4th layer | 1.85 | 1.90 | 1.85 | 1.89 |
Variation | 4.6% | 3.9% |