Surface kinetics of adsorbed Xe atoms on the NEMS device via resonant measurements. (a) Measured effective surface coverage (θ, left axis), along with the calculated surface occupation deviation (σocc, right axis) based on measurement data. (b) Measured number of adsorbed atoms (data: blue circles) and the fit to the Arrhenius equation (dashed line). The fit yields Ea ≈ 63.1 ± 0.23 meV, and va ≈ (1.23 ± 0.05) × 104 Hz. Inset: the characteristic correlation time assuming a pure adsorption–desorption process, τr = 1/(rad + rdes) = N/(sIAD).