Figure 1.
Optical micrographs of the device release windows and surrounding titanium/platinum leads for silicon nanowires (A), nanoplates, and the Pt window (B). The light hue surrounding the release window areas is due to the thickness of the patterned photoresist. A schematic of the device and Pt window cross sections are shown in (C) illustrating the etching process to release the devices and Pt window. The legend for the different layers is below the cross sections.