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. 2013 Sep 5;31(6):06F103. doi: 10.1116/1.4819833

Table I.

XPS determined elemental compositions of bare, ClSi-modified, and pNaSS-grafted Ti and Si substrates. AFM RMS roughness values for each sample are also listed. All composition and roughness values are reported as the avg ± stdev of three spots on two samples.

XPS atomic %
  Evaporated Ti Diced Si
  Bare substrate ClSi iodified pNaSS grafted Bare substrate ClSi modified pNaSS grafted
O1s 54.2 ± 0.5 37.6 ± 1.0 22.5 ± 1.2 34.8 ± 0.7 25.5 ± 0.6 22.6 ± 0.6
C1s 23.3 ± 0.4 44.3 ± 2.1 63.2 ± 1.2 12.6 ± 0.9 41.8 ± 2.3 64.0 ± 0.6
Ti2p 22.4 ± 0.2 13.2 ± 0.5 0.3 ± 0.2 - - -
Si2p - 3.3 ± 1.0 1.3 ± 1.4 52.6 ± 1.3 29.5 ± 1.7 2.0 ± 0.6
Br3d - 1.5 ± 0.2 - - 3.2 ± 1.3 -
S2p - - 6.3 ± 0.5 - - 5.8 ± 0.3
Na1s - - 6.4 ± 0.4 - - 5.6 ± 0.7
AFM RMS roughness 2.2 ± 0.2 2.1 ± 0.3 2.4 ± 0.7 0.2 ± 0.01 0.8 ± 0.2 1.9 ± 0.9