Table I.
XPS atomic % | ||||||
---|---|---|---|---|---|---|
Evaporated Ti | Diced Si | |||||
Bare substrate | ClSi iodified | pNaSS grafted | Bare substrate | ClSi modified | pNaSS grafted | |
54.2 ± 0.5 | 37.6 ± 1.0 | 22.5 ± 1.2 | 34.8 ± 0.7 | 25.5 ± 0.6 | 22.6 ± 0.6 | |
23.3 ± 0.4 | 44.3 ± 2.1 | 63.2 ± 1.2 | 12.6 ± 0.9 | 41.8 ± 2.3 | 64.0 ± 0.6 | |
22.4 ± 0.2 | 13.2 ± 0.5 | 0.3 ± 0.2 | - | - | - | |
- | 3.3 ± 1.0 | 1.3 ± 1.4 | 52.6 ± 1.3 | 29.5 ± 1.7 | 2.0 ± 0.6 | |
- | 1.5 ± 0.2 | - | - | 3.2 ± 1.3 | - | |
- | - | 6.3 ± 0.5 | - | - | 5.8 ± 0.3 | |
- | - | 6.4 ± 0.4 | - | - | 5.6 ± 0.7 | |
AFM RMS roughness | 2.2 ± 0.2 | 2.1 ± 0.3 | 2.4 ± 0.7 | 0.2 ± 0.01 | 0.8 ± 0.2 | 1.9 ± 0.9 |