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. 2013 Nov 29;4:815–833. doi: 10.3762/bjnano.4.93

Table 1.

Comparison between instrumented nanoindentation (INI) and atomic force microscopy (AFM).a

characteristic INI AFM

vertical spring constant 100 N/m from <0.01 N/m to over 500 N/m
lateral spring constant 105 N/m 10–1000 N/mb
lowest fundamental resonance 20–500 kHz several thousand kHz
displacement sensitivity 1 nm 0.05 nm or better
load sensitivity 10 nN <0.05 nNc
dynamic range of force 108 103
nm-scale imaging nonexistent to fair excellent
bandwidth 0.001–100 Hz 1 Hz – several kHz
temporal stabilityd good fair

aParameters given here are typical and may vary from instrument to instrument, bTypically 2 orders of magnitude greater than flexural (normal) spring constant, cDepends on cantilever used in measurement. dSensitive to instrumental design: environmental control can improve this.