Figure 2.

Fabrication process for SU-8 microtubes. (a) Attaching a PET film on the Si substrate; (b) exposing the first layer of SU-8 membrane without development; (c) depositing and patterning two continuous SU-8 layers as sidewall pillars; (d) releasing the SU-8 structure from the substrate and bonding it with PDMS; (e) drawing hollowed microneedles on the top of supporting structures; (f) baking and melting the hollowed microneedles to allow the SU-8 flow in the gaps between pillars; and (g) drawing second time on the top of the melted SU-8 flat surface to get microneedles.