Figure 13.
Thermoelectric output of a InON:ITON 95/5 thermocouple tested after a 5 h, 500 °C nitrogen anneal and 2 h, 1,000 °C air anneal. Note the reduced drift rate of this nitrided all-ceramic thin film thermocouple over its oxide counterpart (Figure 11). An order of magnitude improvement in the drift rate was observed at 0.774 °C/h.