Figure 14.

Thermoelectric output of a InON:ITON 90-10 thermocouple tested over a 100 h period after a 5 h, 500 °C nitrogen anneal and 2 h, 1,000 °C air anneal. The long term stability of this thin film thermocouple was measured in terms of an observed 0.83 °C/h drift rate, which is an order of magnitude improvement over its oxide counterpart (Figure 12).