Table 2.
Parameters for the relationship of thermoelectric voltage to temperature difference and drift rates of thin film thermocouples. For both metallic and ceramic thin film thermocouples, a cubic polynomial was chosen as the best empirical model for the output curves.
| Thin Film Thermocouple | V (ΔT)=A(ΔT)3+B(ΔT)2+C(ΔT) | ||
|---|---|---|---|
|
| |||
| A (mV/°C3) | B (mV/°C2) | C (mV/°C) | |
| In2O3vs. ITO (95/5) | −6.90 × 10−7 | 1.44 × 10−4 | 7.27 × 10−2 |
| In2O3vs. ITO (90/10) | −7.78 × 10−7 | 1.41 × 10−4 | 6.33 × 10−2 |
| InON vs. ITON (95/5) | −1.43 × 10−8 | 4.66 × 10−5 | 2.17 × 10−2 |
| InON vs. ITON (90/10) | −1.61 × 10−8 | 5.47 × 10−5 | 2.54 × 10−2 |
| Pt:Pd on alumina | 2 × 10−5 | 5 × 10−4 | 8.44 × 10−1 |
| Pt:Pd on mullite | 1 × 10−-5 | 4.9 × 10−3 | −2.7 × 10−2 |