Table 3.
Drift rates of thin film thermocouples at maximum hot junction temperature during testing. Note the order of magnitude reduction in drift rates for the Pt:Pd thin film thermocouples versus type-S and oxynitride-based versus oxide-based.
| Thin Film Thermocouple | Drift Rate (°C/h) | Seebeck Coefficient (μV/°C) |
|---|---|---|
| In2O3vs. ITO (95/5) | 3.76 (@ 1200 °C) | −897.7 (@ 1200 °C) |
| In2O3vs. ITO (90/10) | 20.4 (@ 1200 °C) | −1,065.4 (@ 1200 °C) |
| InON vs. ITON (95/5) | 0.57 (@ 1200 °C) | 68.4 (@ 1200 °C) |
| InON vs. ITON (90/10) | 0.63 (@ 1200 °C) | 81.4 (@ 1200°C) |
| Pt:Pd on alumina | −0.06 (@ 900 °C) | −12.9 (@ 900 °C) |
| Pt:Pd on mullite | −0.83 (@ 900 °C) | −14.3 (@ 900 °C) |