| U11 | U22 | U33 | U12 | U13 | U23 | |
| Cl1 | 0.0438 (5) | 0.0390 (5) | 0.0476 (6) | 0.0069 (4) | −0.0035 (4) | 0.0071 (4) |
| O1 | 0.0297 (12) | 0.0267 (12) | 0.0646 (18) | −0.0043 (10) | 0.0029 (11) | −0.0057 (12) |
| C2 | 0.0266 (15) | 0.0251 (15) | 0.038 (2) | −0.0052 (13) | 0.0062 (14) | 0.0020 (14) |
| N1 | 0.0440 (16) | 0.0248 (14) | 0.062 (2) | 0.0047 (13) | −0.0059 (15) | −0.0056 (14) |
| C4 | 0.0281 (15) | 0.0200 (14) | 0.042 (2) | 0.0012 (13) | −0.0025 (15) | 0.0036 (14) |
| N2 | 0.0309 (13) | 0.0341 (14) | 0.0405 (17) | −0.0032 (12) | 0.0040 (13) | −0.0069 (13) |
| C6 | 0.0306 (16) | 0.0300 (17) | 0.039 (2) | −0.0008 (14) | 0.0073 (15) | 0.0012 (15) |
| C7 | 0.0326 (16) | 0.0270 (16) | 0.046 (2) | −0.0029 (14) | 0.0076 (16) | −0.0019 (15) |
| C8 | 0.048 (2) | 0.0262 (17) | 0.046 (2) | −0.0076 (16) | 0.0130 (18) | −0.0030 (16) |
| C9 | 0.0365 (18) | 0.051 (2) | 0.036 (2) | −0.0082 (18) | 0.0047 (16) | −0.0041 (18) |
| C10 | 0.0447 (19) | 0.045 (2) | 0.043 (2) | −0.0132 (18) | 0.0148 (18) | −0.0141 (18) |
| C11 | 0.042 (2) | 0.052 (2) | 0.056 (3) | 0.0000 (18) | −0.0020 (19) | −0.021 (2) |
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