U11	U22	U33	U12	U13	U23
O1	0.0341 (6)	0.0208 (5)	0.0258 (6)	−0.0064 (5)	0.0045 (5)	−0.0028 (5)
O2	0.0368 (6)	0.0174 (5)	0.0199 (5)	−0.0020 (5)	0.0000 (5)	0.0017 (4)
O3	0.0358 (6)	0.0279 (6)	0.0190 (5)	−0.0027 (5)	−0.0006 (5)	0.0043 (4)
N1	0.0364 (8)	0.0191 (7)	0.0415 (8)	−0.0011 (6)	0.0020 (7)	0.0013 (6)
C1	0.0310 (8)	0.0222 (7)	0.0232 (8)	−0.0057 (6)	0.0029 (6)	−0.0029 (6)
C2	0.0339 (9)	0.0375 (9)	0.0248 (8)	−0.0065 (8)	−0.0004 (7)	−0.0055 (7)
C3	0.0343 (9)	0.0430 (10)	0.0201 (8)	−0.0023 (8)	−0.0030 (7)	0.0005 (7)
C4	0.0320 (8)	0.0297 (8)	0.0212 (7)	0.0066 (7)	0.0028 (7)	0.0048 (6)
C5	0.0342 (9)	0.0220 (7)	0.0183 (7)	0.0041 (7)	0.0033 (7)	0.0048 (6)
C6	0.0346 (9)	0.0194 (7)	0.0236 (7)	0.0020 (7)	0.0069 (7)	0.0046 (6)
C7	0.0269 (8)	0.0203 (7)	0.0238 (8)	−0.0003 (6)	0.0024 (6)	0.0014 (6)
C8	0.0237 (8)	0.0164 (7)	0.0191 (7)	0.0006 (6)	0.0002 (6)	0.0006 (5)
C9	0.0266 (8)	0.0175 (7)	0.0185 (7)	0.0021 (6)	0.0016 (6)	0.0008 (5)
C10	0.0261 (7)	0.0177 (7)	0.0220 (7)	−0.0004 (6)	0.0016 (6)	0.0014 (6)
C11	0.0256 (8)	0.0206 (7)	0.0212 (7)	0.0012 (6)	−0.0012 (6)	−0.0002 (6)
C12	0.0229 (7)	0.0194 (7)	0.0197 (7)	−0.0002 (6)	−0.0007 (6)	0.0014 (6)
C13	0.0254 (8)	0.0233 (8)	0.0183 (7)	0.0023 (6)	−0.0002 (6)	0.0009 (6)
C14	0.0346 (9)	0.0279 (8)	0.0340 (9)	0.0007 (8)	0.0070 (7)	−0.0037 (7)
C15	0.0374 (9)	0.0242 (8)	0.0287 (8)	0.0011 (7)	0.0045 (7)	−0.0054 (7)
C16	0.0260 (8)	0.0196 (7)	0.0229 (7)	0.0015 (6)	0.0009 (6)	−0.0024 (6)
C17	0.0325 (8)	0.0198 (7)	0.0235 (7)	0.0036 (7)	−0.0022 (7)	−0.0033 (6)
C18	0.0329 (9)	0.0235 (7)	0.0265 (8)	0.0046 (7)	−0.0001 (7)	0.0014 (6)
C19	0.0242 (7)	0.0192 (7)	0.0365 (9)	0.0005 (6)	0.0031 (7)	−0.0004 (7)
C20	0.0256 (8)	0.0229 (8)	0.0314 (8)	−0.0004 (6)	−0.0019 (7)	−0.0060 (6)
C21	0.0265 (8)	0.0242 (8)	0.0229 (7)	0.0016 (6)	−0.0011 (6)	−0.0031 (6)