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. Author manuscript; available in PMC: 2014 Jan 13.
Published in final edited form as: J Microelectromech Syst. 2012 Apr 10;21(4):882–896. doi: 10.1109/JMEMS.2012.2190712

Fig. 13.

Fig. 13

Showing the MEMS chevron microactuator condition (a) before and (b) after the leaking tests by dipping the front edge of the package into a bath of de-ionized water at room temperature for two days.