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. Author manuscript; available in PMC: 2014 Jan 13.
Published in final edited form as: J Microelectromech Syst. 2012 Apr 10;21(4):882–896. doi: 10.1109/JMEMS.2012.2190712

Fig. 14.

Fig. 14

Showing the live picture of the MEMS chevron microactuators that actuate the microelectrode up and down while dipping half of the package into a purple-colored water for more than 24 h (86 000 cycles).