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. Author manuscript; available in PMC: 2014 Jan 13.
Published in final edited form as: J Microelectromech Syst. 2012 Apr 10;21(4):882–896. doi: 10.1109/JMEMS.2012.2190712

Fig. 18.

Fig. 18

(a) Minimum force needed to fully shear/detach the top die as a function of number of dies in a stack. (b) Minimum stress/bump experienced by the top die as a function of number of stacks.