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. Author manuscript; available in PMC: 2014 Jan 13.
Published in final edited form as: J Microelectromech Syst. 2012 Jul 13;21(5):1172–1186. doi: 10.1109/JMEMS.2012.2203789

Fig. 11.

Fig. 11

Force output by Chevron-peg microactuators with two heat strips. Peak force output occurs at the instance the microactuator displaces the microelectrode during the actuation cycle. The microelectrode is actuated over 20 actuation cycles and the average peak force output is calculated.