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. Author manuscript; available in PMC: 2014 Jan 13.
Published in final edited form as: J Microelectromech Syst. 2012 Jul 13;21(5):1172–1186. doi: 10.1109/JMEMS.2012.2203789

Fig. 12.

Fig. 12

Resistance measurements across the reverse actuator in the Chevron-peg type and release down actuators in the Chevron-latch type that were operated at a frequency of 10 actuation cycles/s. The reverse actuator of the Chevron-peg type shows constancy in electrical measurements. The release down actuator in the Chevron-latch type shows large variations in individual measurements that were recorded over a period of 1 h while the actuator was in operation.