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. Author manuscript; available in PMC: 2014 Jan 13.
Published in final edited form as: J Microelectromech Syst. 2012 Jul 13;21(5):1172–1186. doi: 10.1109/JMEMS.2012.2203789

Fig. 14.

Fig. 14

Microelectrode displacement errors as function of distance moved. The microelectrode was actuated with the following parameters: Pulsewidth of 1 ms and frequency of movement of 1 Hz. Significant error is seen during the initial phase of movement, and the error settles down to a steady-state value after approximately 360 μm (55 cycles of movement).