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Activation waveforms for the four different electrothermal actuators to move the microelectrode. The amplitude of the waveform depends on the operating voltage defined for the particular actuator. The microelectrode moves by one step, i.e., 6.5 μm in one complete actuation cycle. The time taken for one complete actuation cycle to achieve one forward or one backward step is six time periods or “6t.” (a) Forward actuation waveform. (b) Backward actuation waveform.
