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. Author manuscript; available in PMC: 2014 Jan 13.
Published in final edited form as: J Microelectromech Syst. 2012 Jul 13;21(5):1172–1186. doi: 10.1109/JMEMS.2012.2203789

Fig. 9.

Fig. 9

(a) Backward movement profile of an microelectrode actuated at 0.1 Hz with a time period of 10 ms. At 0.1 Hz, the microelectrode is expected to move by 6.5 μm every 10 s. The microelectrode got stuck after being displaced by about 200 μm, and repeated pulsing of the actuators allows it to recover movement. (b) Backward movement profile of an microelectrode actuated at 0.1 Hz with a waveform of 1 ms. The microelectrode jumps through more than one step per actuation cycle, resulting in a faster retraction of the microelectrode than expected.