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. Author manuscript; available in PMC: 2014 Jan 13.
Published in final edited form as: J Microelectromech Syst. 2012 Jul 13;21(5):1172–1186. doi: 10.1109/JMEMS.2012.2203789

TABLE I.

COMPARISON BETWEEN THE TWO TYPES OF ACTUATION MECHANISMS

Device attributes Chevron-latch mechanism Chevron-peg mechanism
Voltage levels for actuation 9V 5.8-6.5 V
Actuation step 9 μm 6.5 μm
Full stroke length 5 mm 5 mm
Maximum frequency of
operation
333 Hz 333 Hz
Minimum duration of activation
cycle
3 ms 6 ms
Power consumption 380 mW/cycle 90 mW/cycle
Force generated per heat strip 50 μN 111 μN