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USAF resolution target acquired by the reported microscopy system. The effective FOV is about 10 mm × 7.5 mm, with 26400 pixels × 20400 pixels across the entire image. The imaging performance at the (a) center, (b) 50% away from center and (c) 95% away from center. The line widths of group 9, element 1, 2 and 3 are 0.98 µm, 0.87 µm, and 0.78 µm, respectively.
