Table 1.
XRD peak position of (002) diffraction and main lattice constants of InN films for our samples
| Sample A | Sample B | Sample C | Sample E | Sample F | |
|---|---|---|---|---|---|
| InN(002) (°) |
15.82 |
15.83 |
15.95 |
16.15 |
16.19 |
|
c(Å) |
5.68 |
5.67 |
5.63 |
5.57 |
5.56 |
| InN(101) (°) |
16.65 |
16.60 |
16.53 |
16.43 |
16.37 |
|
d101 (Å) |
2.70 |
2.71 |
2.72 |
2.73 |
2.74 |
| a(Å) | 3.54 | 3.56 | 3.58 | 3.61 | 3.63 |