Skip to main content
. 2014 Jan 8;9(1):9. doi: 10.1186/1556-276X-9-9

Figure 2.

Figure 2

Tilted FESEM images of the Si nanostructures etched by various flow rates of mixture gas. (a) 0.5 sccm. (b) 2.5 sccm. (c) 5.0 sccm. Inset: magnified FESEM images of the aggregate of nanoparticles.