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The position of the FZP optic as tracked by the laser interferometric feedback system at the NPI is shown here sampled at 1 kHz during the course of a single 50 nm displacement in the vertical direction relative to the sample. With a 4.0 nm RMS oscillation about the command value, reliable raster scans of the focused X-ray beam with step sizes down to less than 10 nm can accurately and reliably be achieved.
