Table 2.
Summary of the system components and their models.
| Element | Model | Value(s) | Electrical analog and symbol: |
|
|---|---|---|---|---|
| Restoring force on diaphragm due to viscous pressure loss of fluid flow in tubing or channels | Ff = Q · R · Ad = υd · R · Ad2 |
R = 0.09 psi/(µL/min) Ad = πa 2 = 33 mm2 |
 |
|
| Restoring force of circular elastic diaphragm (Bending forces neglected because displacements > thickness44) |
Fd = B[(vol/C)3 – z0d3] (vol = Cz) |
C=πa2/2; |
E = 3.5 GPa t = .025 mm ν = 0.3 a = 3.25 mm z0d = 0.01 mm |
 |
| Restoring force of coil spring | Fs = k(z0s - z) |
k = 0.162 N/mm z0s = 0.70 mm |
 |
|
| Inertial masses | Meff = Ma + Mfeff |
Ma = 1 gram Mfeff = 5 milligram · (Am/Ac) = 9.1 gram |
 |
|
| Actuator force (empirical fit to published data for small displacements) | Fa = D (z + z0a) V2 |
D = 0.296 N/(V2·mm) z0a = 0.195 mm |
 |
|