Official websites use .gov
A
.gov website belongs to an official
government organization in the United States.
Secure .gov websites use HTTPS
A lock (
) or https:// means you've safely
connected to the .gov website. Share sensitive
information only on official, secure websites.
(a) schematic figure of the MDR composed of a disk and a bus waveguide (vertical grating couplers not shown); (b) SEM image of the fabricated MDR, the scale bar represents 10 μm; (c) SEM image of the vertical grating coupler, the scale bar represents 30 μm; (d) SEM image of the zoom-in coupling region between the disk and the straight waveguide, the scale bar represents 2 μm.
