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. Author manuscript; available in PMC: 2014 Feb 4.
Published in final edited form as: J Microelectromech Syst. 2011 Nov 3;21(1):132–144. doi: 10.1109/JMEMS.2011.2171326

TABLE III.

Height Statistics of 18 DPAT Solder Bumps on a MEMS Chip

Average = 184.8 μm
standard Deviation = 13.6 μm
Max = 195 μm
MIN = 167 μm
Range = 28 μm