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XPS determined surface elemental compositions of Spot i (substrate and PFPA) and Spot ii (graphene) in Figure 8d obtained by small-spot ROI analysis (27 μm × 27 μm).
| Atomic % | ||
|---|---|---|
| Spot i | Spot ii | |
| F 1s | 7.7 | 5.1 |
| O 1s | 28.3 | 23.2 |
| N 1s | 5.2 | 4.1 |
| Si 2p | 13.5 | 10.0 |
| C 1s | 45.3 | 57.6 |
