Skip to main content
. 2008 Jun 9;8(6):3848–3872. doi: 10.3390/s8063848

Figure 3.

Figure 3.

Scanning Electron Microscopy images of the tapered tip from structures fabricated with different mask openings sizes. (a) 400 μm, (b) 500 μm, (c) 600 μm and (d) 700 μm. Etching was performed in 9 M KOH at room temperature with no stirring. The etching was performed to a 500 μm depth.