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. 2013 Dec 23;14(1):229–244. doi: 10.3390/s140100229

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© 2014 by the authors; licensee MDPI, Basel, Switzerland.

This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution license (http://creativecommons.org/licenses/by/3.0/).

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Figure 3. — (a) SU-8 microchip with microfluidic channel; (b) top view of a 3.7 μm thick SU-8 flow sensor containing 180 holes with dimensions 10 × 10 μm².