Figure 5.
Top view of a 580 nm thick SiN flow sensor containing 180 holes with dimensions 10 × 10 μm2.
Official websites use .gov
A
.gov website belongs to an official
government organization in the United States.
Secure .gov websites use HTTPS
A lock (
) or https:// means you've safely
connected to the .gov website. Share sensitive
information only on official, secure websites.