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Flow rate detection limit (nL/min) of the developed flow meters depending on material, thickness and sensor design.
| Hole Design | Porosity (%) | SiN 580 nm | SU-8 3.7 μm | SU-8 5.4 μm | SU-8 11.2 μm |
|---|---|---|---|---|---|
| 5(405) | 8.0 | 3.00 | 4.07 | 4.12a | |
| 5(630) | 12.5 | 0.76 | |||
| 10(112) | 8.9 | 3.54 | 6.50 | 7.62 | |
| 10(180) | 14.3 | 0.97 | 6.36 | 9.03 | 14.16 |
| 20(45) | 14.3 | 5.72 | 14.36 | 18.12 | |
| 20(66) | 21.0 | 6.00 | 12.91 | 42.20 |
Porosity 5.2% due to lower lithographic resolution.
