. 2014 Jan 14;14(1):1394–1473. doi: 10.3390/s140101394

Table 10.

The summary of MSG gyroscopes.

Institute	Time	Fabrication	Materials	Rotation Speed (rpm)	References
NTU	2000	Bulk micromachining	Si, Al	1000	[110]
SJTU	2006	Bulk micromachining	Al₂O₃, Al, Cu	3035	[111]
	2008	Surface micromachining	Silicon, Al₂O₃	Over10 in the air	[112]
	2010	Bulk micromachining	Glass, Cu, Ni,	Changeable	[113]
UEST	2009	Bulk micromachining	/	12,000	[114]
NCKU	2009	Surface micromachining	Cr, Au, Cu	Sin, 6250 Hz	[115]