Table 11.
The summary of micro fluid gyroscopes.
| Institute | Time | Size | Materials | Drive/Sense | Detected Axis | References |
|---|---|---|---|---|---|---|
| Keio University |
2008 | 40 × 60 × t7 mm3 | Liquid | Jet/thermistor | Z | [134,135] |
| TSCL, RU | 2004 | 400 × 4 × 2 um3 | Liquid | Piezoelectric/ thermistor |
X/Y | [136] |
| RU | 2013 | Φ16× 1 mm3 | Liquid | Piezoelectric/ thermistor |
X/Y | [137] |
| HUST | 2006 | 8 × 0.4 × 0.25 mm3 | Liquid | Thermal/ thermistor |
X/Y | [138] |
| NUST, SFU | 2013 | 2020 × 990 × 315 um3 | Gas | Thermal/ thermistor |
Z | [139,140] |
| NPU | 2013 | Φ20 × 7 mm3 | Gas | Jet/thermistor | X/Y/Z | [141] |