. 2014 Jan 14;14(1):1394–1473. doi: 10.3390/s140101394

Table 13.

Comparison of some typical kinds of micromachined gyroscopes.

Categories	Performance (at Present)	Characteristics (in Theory)	Application
MVG	Better level, bias drift has reached sub-degree per hour	Ease to control, high stability, have suspending springs and proof masses, poor robustness, mode mismatched, usually vacuum packaged	Mature at present, the most widely used in the micromachined gyroscope market
MVG	Better level, bias drift has reached sub-degree per hour
PVG	Lowest	Good robustness, wide measuring range and higher resistance to shock and shake, can work in atmospheric environment, poor stability, hard in signal extraction	Less used at present
PVG	Lowest		Less used at present
SAW gyroscope	Lower	Good robustness, very wide measuring range, low power consumption, low sensitivity, compatible with standard IC process, complex measurement circuit	Less used at present, but have good application prospect because of low power consumption and wireless circuitry
SAW gyroscope	Lower
BAW gyroscope	Good level, bias drift can reach tens of degree per hour	High resonant frequency and Q-factor, very low noise floor, low cost, sustaining electronics noise and high bandwidth requirement due to the high frequency	Less used at present, but have good application prospect
BAW gyroscope	Good level, bias drift can reach tens of degree per hour		Less used at present, but have good application prospect
MESG	Middle level, bias drift can reach dozens of degree per hour	Long life without mechanical friction, insensitive to fabrication tolerances, mode coupling, high cost, complex circuitry	Have some application at present, and will have best application prospect
MESG
MSG	Low	Simple structure, no energy input and simple control circuit, very little mechanical friction, insensitive to fabrication tolerances, can work at atmosphere, mode coupling, poor stability	Technology is still not mature enough, less used at present
MSG	Low		Technology is still not mature enough, less used at present
MFOG	Several degree per hour	High precision, long life and robustness, wide dynamic range, strict light source and signal process, high cost	Technology is still not mature enough, have improvement space
MFOG	Several degree per hour
MAG	Still developed	Potential high sensitivity, ultra-small volume, ultra-low power consumption, hard detection, high requirement for measurement instrument	Technology is still not mature enough, have improvement space
MAG	Still developed
MFG	Low	Long life, good robustness, ultra-low cost, low precision	Have improvement space in low precision fields