Table 2.
The summary of TFGs.
| Institute | Time | Fabrication | Drive/Sense | Detected Axis | References |
|---|---|---|---|---|---|
| SIMIT and SJTU |
2005,2006 | Bulk micromachining |
Electromagnetical/ capacitance |
Z | [16,17] |
| SIMIT and TJU |
2010, 2013 | Bulk micromachining |
Electrostatic/ capacitance |
Z | [18,29] |
| PKU | 2010 | SOG | Electrostatic/ capacitance |
Lateral | [19,20] |
| Georgia Tech | 2004–2009 | SOI | Electrostatic/ capacitance |
Z | [21–25] |
| CEA-LETI | 2013 | SOI | Electrostatic/ capacitance |
X/Y/Z | [26] |
| HSG-IMIT | 2007 | SOI | Electrostatic/ capacitance |
X/Y/Z | [27] |
| NUDT | 2012 | Quartz anisotropic wet etching |
Electrostatic/ shear stress |
Z | [28] |