Table 3.

The summary of decoupled gyroscopes.

Institute	Time	Decoupled Style	Fabrication	Drive/Sense	Detected Axis	Reference
PKU	2009	Double decoupling	SOG	Electrostatic/ capacitance	Lateral	[30,31]
HSG-IMIT	2003	Double decoupling	Bulk micromachining	Electrostatic/ capacitance	Z	[32]
UC Irvine	2005	Double decoupling	Bulk micromachining	Electrostatic/ capacitance	Z	[33]
Middle East Tech	2002–2008	Double decoupling	Surface/bulk micromachining	Electrostatic/ capacitance	Z	[34–39]
Korean universities	2003,2008	Single decoupling	Surface micromachining	Electrostatic/ capacitance	Lateral	[40,41]
NTU	2012	Double decoupling	MetalMUMP	Electrostatic/ capacitance	Z	[42]
Saarland University	2012	Double decoupling	Surface micromachining	Electrostatic/ capacitance	Z	[43]