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. 2014 Jan 14;14(1):1394–1473. doi: 10.3390/s140101394

Table 4.

The summary of decoupled gyroscopes.

Institute Time Fabrication Gimbal
Amount 		Drive/Sense Detection
Axis 		Reference
Draper 1991 Bulk
micromachining		 Double Electrostatic/
capacitance		 Z [44]
HSG-IMIT 1999 Bosch Foundry
process		 Double Electrostatic/
capacitance		 X [46]
SIMIT 2002 Bulk
micromachining		 Single Electrostatic/
capacitance		 Z [47]
University of
Hyogo		 2003 SOI Double Electromagnetic/
potential		 Z [48]