Table 5.
The summary of VRGs.
| Institute | Time | Fabrication | Materials | Drive/Sense | Detected Axis | References |
|---|---|---|---|---|---|---|
| UMich | 1998 | Bulk/surface micromachining |
Ploysilicon | Electrostatic/ capacitance |
Z | [49] |
| CAS | 2010, 2012 |
Bulk micromachining |
Single crystal silicon |
Electromagnetic/ inductive |
Z | [52,53] |
| 2010 | HARPSS | Single crystal silicon |
Electrostatic/ capacitance |
Z | [54] | |
| Georgia Tech |
2005 | HARPSS | Polysilicon | Electrostatic/ capacitance |
Z | [55] |
| NCL | 2005, 2011 |
Bulk micromachining |
Polysilicon | Electrostatic/ capacitance |
Z | [56,57] |